Publikationen

2017

78. G. Willems, J. Benedikt, A. von Keudell, Absolutely calibrated mass spectrometry measurement of reactive and stable plasma chemistry products in the effluent of a He/H2O atmospheric plasma, J. Phys. D: Appl. Phys. 50 (2017) 335204

77. F. Mitchker et al., Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence, J. Phys. D: Appl. Phys. 50 (2017) 235201

76. S. Bekeschus et al., Oxygen atoms are critical in rendering THP-1 leukaemia cells susceptible to cold physical plasma-induced apoptosis, Scientific Reports 7 (2017) 2791

75. C.C.W. Verlackt et al., Mechanisms of Peptide Oxidation by Hydroxyl Radicals: Insight at the Molecular Scale, J. Phys. Chem. C 121 (2017) 5787

2016

74. K. Herynkova et al., Structural and luminescence properties of silicon nanocrystals in colloidal solutions for bio applications, Phys. Status Solidi A 213 (2016) 2873

73. M. Mokhtar Hefny, C. Pattyn, P. Lukes, J. Benedikt, Atmospheric plasma generates oxygen atoms as oxidizing species in aqueous solutions, J. Phys. D: Appl. Phys. 49 (2016) 404002

72. O. Cibulka et al., Comparison of Silicon Nanocrystals Prepared by Two Fundamentally Different Methods, Nanoscale Res. Lett. 11 (2016) 445

71. S. Große-Kreul, S. Hübner, S. Schneider, A. von Keudell, J. Benedikt, Methods of gas purification and effect on the ion composition in an RF atmospheric pressure plasma jet investigated by mass spectrometry, EPJ Techniques and Instrumentation 3 (2016) 6.

70. J. Benedikt et al., Absolute OH and O radical densities in effluent of a He/H2O micro-scaled atmospheric pressure plasma jet, Plasma Sources Sci. Technol. 25 (2016) 045013

69. S. Große-Kreul, J. Benedikt, Sampling of ions at atmospheric pressure: Ion transmission and ion energy studied by simulation and experiment, Eur. Phys. J. D 70 (2016) 103

68. C. Douat, S. Hübner, R. Engeln, J. Benedikt, Production of nitric/nitrous oxide by an atmospheric pressure plasma jet, Plasma Sources Sci. Technol. 25 (2016) 025027

67. D. Mariotti, T. Belmonte, J. Benedikt, T. Velusamy, G. Jain, V. Švrček, Low-Temperature Atmospheric Pressure Plasma Processes for ‘‘Green’’ Third Generation Photovoltaics, Plasma Process. Polym. 13 (2016) 70

66. J. Benedikt, Entry: Atmospheric Pressure Plasmas: Free-radical Measurements in, entry in Encyclopedia of Plasma Technology, LLC Encyclopedia Program (2016)

2015

65. E. Edengeiser, J.-W. Lackmann, E. Bründermann, S. Schneider, J. Benedikt, J.E. Bandow, M. Havenith, Synergistic effects of atmospheric pressure plasma-emitted components on DNA oligomers: a Raman spectroscopic study, J. Biophotonics 8 (2015) 918

64. J.-W. Lackmann, S. Baldus, E. Steinborn, E. Edengeiser, F. Kogelheide, S. Langklotz, S. Schneider, L. Leichert, J. Benedikt, P. Awakowicz, J. Bandow, A Dielectric Barrier Discharge Terminally Inactivates RNase A by Oxidizing Sulfur-containing Amino Acids and Breaking Structural Disulfide Bonds, J. Phys. D: Appl. Phys. 48 (2015) 494003

63. S. Schneider, F. Jarzina, J.-W. Lackmann, J. Golda, V. Layes, V. Schulz-von der Gathen, J. Bandow, J. Benedikt, Summarizing results on the performance of a selective set of atmospheric plasma jets for separation of photons and reactive particles, J. Phys.D: Appl. Phys. 48 (2015) 444001

62. S. Große-Kreul, S. Hübner, S. Schneider, D. Ellerweg, A. von Keudell, Š. Matějčík, J. Benedikt, Mass spectrometry of atmospheric pressure plasmas, Plasma Sources Sci. Technol. 24 (2015) 044008

61. B. Barwe, F. Riedel, O.E. Cibulka, I. Pelant, J. Benedikt, Silicon nanoparticle formation depending on discharge conditions of atmospheric radio-frequency driven microplasma with argon/silane/hydrogen gases, J. Phys. D.: Appl. Phys. 48 (2015) 314001

60. W. Breilmann, A. Eitrich, C. Maszl, A. Hecimovic, V. Layes, J. Benedikt, A. von Keudell, High Power Impulse Sputtering of Chromium: correlation between the energy distribution of chromium ions and spoke formation, J. Phys. D.: Appl. Phys. 48 (2015) 295202

59. B. Barwe, A. Stein, O.E. Cibulka, I. Pelant, J. Benedikt, Generation of Silicon Nanostructures by Atmospheric Microplasma Jet: The Role of Hydrogen Admixture, Plasma Process. Polym. 12 (2015) 132

2014

58. C. Maszl, W. Breilmann, L. Berscheid, J. Benedikt, A. von Keudell, Fast Time Resolved Techniques as Key to the Understanding of Energy and Particle Transport in HPPMS-Plasmas, IEEE Trans. Plasma Sci. 42 (2014) 2812

57. S. Schneider, M. Dünnbier, S. Hübner, S. Reuter, J. Benedikt, Atomic Nitrogen: A Parameter Study of a Micro Scale Atmospheric Pressure Plasma Jet by Means of Molecular Beam Mass Spectrometry, J. Phys. D: Appl. Phys. 47 (2014) 505203

56. D. Nečas, V. Čudek, J. Vodák, M. Ohlídal, P. Klapetek, J. Benedikt, K Rügner, L. Zajíčková, Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry, Meas. Sci. Technol. 25 (2014) 115201

55. C. Maszl, W. Breilmann, J. Benedikt, A. von Keudell, Origin of the energetic ions at the substrate generated during high power pulsed magnetron sputtering of titanium, J. Phys. D: Appl. Phys. 47 (2014) 224002

54. K. Rügner, R. Reuter, A. von Keudell, J. Benedikt, The effect of surface reactions of O, O3 and N on film properties during the growth of silica-like films, J. Phys. D: Appl. Phys. 47 (2014) 224005

2013

53. C. Corbella, S. Große-Kreul, O. Kreiter, T. de los Arcos, J. Benedikt, A. von Keudell, Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces, Rev. Sci. Instr. 84 (2013) 103303

52. F. Mitschker, M. Prenzel, J. Benedikt, C. Maszl, A. von Keudell, Time-resolved measurement of film growth during reactive high power pulsed magnetron sputtering (HIPIMS) of titanium nitride, J. Phys. D 46 (2013) 495201

51. W. Breilmann, C. Maszl, J. Benedikt, A. von Keudell, Dynamic of the growth flux at the substrate during high-power pulsed magnetron sputtering (HiPIMS) of titanium, J. Phys. D 46 (2013) 485204

50. K. Rügner, R. Reuter, D. Ellerweg, T. de los Arcos, A. von Keudell, J. Benedikt, Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure, Plasma Process. Polym. 10 (2013) 1061

49. J. Benedikt, D. Ellerweg, S. Schneider, K. Rügner, R. Reuter, H. Kersten, T. Benter, Mass pectrometry of positive ions and neutral species in the effluent of an atmospheric pressure plasma with hexamethyldisiloxane and oxygen, J. Phys D. 46 (2013) 464017

48. J.-W. Lackmann, S. Schneider, E. Edengeiser, F. Jarzina, S. Brinckmann, E. Steinborn, M. Havenith, J. Benedikt, J.E. Bandow, Photons and particles emitted from cold atmospheric-pressure plasma inactivate bacteria and biomolecules independently and synergistically, J. R. Soc. Interface 10, (2013) 20130591

47. F. Mitschker, M. Prenzel, J. Benedikt, C. Maszl, A. von Keudell, Time-resolved measurement of film growth during high-power pulsed magnetron sputtering (HIPIMS) of titanium, J. Phys. D 46 (2013) 155204

2012

46. J. Benedikt, A. Hecimovic, D. Ellerweg, A. von Keudell, Quadrupole Mass Spectrometry of Reactive Plasmas, J. Phys. D: Appl. Phys. 45 (2012) 403001

45. F. Fanelli, J. Benedikt, Editorial: Special Issue on Cold Atmospheric Plasmas for Thin Films and Nanomaterials, Plasma Process. Polym. 9 (2012) 1040

44. F. Mitschker, M. Prenzel, J. Benedikt, A. von Keudell, Time resolved measurement of film growth during HPPMS of titanium: the rotating shutter concept, J. Phys. D: Appl. Phys 45, (2012) 402001

43. R. Reuter, N. Gherardi, J. Benedikt, Effect of N2 dielectric barrier discharge treatment on the composition of SiO2-like films deposited from hexamethyldisiloxane at atmospheric pressure, Appl. Phys. Lett. 101 (2012) 194104

42. D. Ellerweg, A. von Keudell, J. Benedikt, Unexpected O and O3 production in the effluent of He/O2 microplasma jets emanating into ambient air, Plasma Sources Sci. Technol. 21 (2012) 034019

41. B. Niermann, R. Reuter, T. Kuschel, J. Benedikt, M. Böke, J. Winter, Argon metastable dynamics in a filamentary jet micro-discharge at atmospheric pressure, Plasma Sources Sci. Technol. 21 (2012) 034002

40. T. Krähling, D. Ellerweg, J. Benedikt, The influence of the ionizer geometry on the absolute density calibration of reactive neutral species in a molecular beam mass spectrometry, Rev. Sci.Instrum. 83 (2012) 045114

39. D. Hegemann, E. Körner, S. Chen, J. Benedikt, A. von Keudell, Functional plasma polymers deposited in capacitively and inductively coupled plasmas, Appl. Phys. Lett. 100 (2012) 051601

38. R. Reuter, K. Rügner, D. Ellerweg, T. de los Arcos, A. von Keudell, J. Benedikt, The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure, Plasma Process. Polym. 9 (2012) 1116

37. S. Schneider, J.-W. Lackmann, D. Ellerweg, B. Denis, F. Narberhaus, J.E. Bandow, J. Benedikt, The role of VUV radiation in the inactivation of bacteria with an atmospheric pressure plasma jet, Plasma Process. Polym. 9 (2012) 561

36. J.-W. Lackmann, S. Schneider, F. Narberhaus, J. Benedikt, J.E. Bandow, Characterization of damage to bacteria and bio-macromolecules caused by (V)UV radiation and particles generated by a microscale-APPJ, in Plasma for bio-decontamination, medicine and food security, NATO Science for Peace and Security Series - A, (Springer) (2012), pp. 17-29

2011

35. S. Schneider, J.-W. Lackmann, F. Narberhaus, J.E. Bandow, B. Denis, J. Benedikt, Separation of VUV/UV photons and reactive particles in the effluent of a He/O2 atmospheric pressure plasma jet, J. Phys. D: Appl. Phys. 44 (2011) 295201

34. R. Reuter, D. Ellerweg, A. von Keudell, J. Benedikt, Surface reactions as carbon removal mechanism in deposition of silicon dioxide films at atmospheric pressure, Appl. Phys. Lett. 98 (2011) 111502

2010

33. J. Benedikt, S. Hofmann, N. Knake, H. Böttner, R. Reuter, A. von Keudell, V. Schulz-von der Gathen, Phase resolved optical emission spectroscopy of coaxial microplasma jet operated with He and Ar, Eur. Phys. J. D 60 (2010) 539

32. J. Benedikt, Plasma-chemical reactions: low pressure acetylene plasmas, J. Phys. D 43 (2010) 043001

31. A. von Keudell, P. Awakowicz, J. Benedikt, V. Raballand, A. Yanguas-Gil, J. Opretzka, C. Flötgen, R. Reuter L. Byelykh, H. Halfmann, K. Stapelmann, B. Denis, J. Wunderlich, P. Muranyi, F. Rossi, O. Kylian, N. Hasiwa, A. Ruiz, H. Rauscher, L. Sirghi, E. Comoy, C. Dehen, C. Challier, J.P. Deslys, Inactivation of bacteria and biomolecules using low pressure plasma discharges (BIODECON review), Plasma Processes and Polymers 7 (2010) 327

30. D. Ellerweg, J. Benedikt, N. Knake, V. Schulz-von der Gathen, A. von Keudell, Characterization of the effluent of a He/O2 microscale atmospheric pressure plasma jet by quantitative molecular beam mass spectrometry, New J. Phys. 12, 013021 (2010)

29. H. Rauscher, Ondřej Kylián, J. Benedikt, A. von Keudell, F. Rossi, Elimination of Biological Contaminations from Surfaces by Plasma Discharges: Chemical Sputtering, Chem. Phys. Chem. 11 (2010) 1382

28. A. von Keudell, J. Benedikt, A Physicist's Perspective on Views on Macroscopic Kinetics of Plasma Polymerisation, Plasma Process. Polym. 7 (2010) 376

2009

27. O. Kylián, J. Benedikt, L. Sirghi, R. Reuter, H. Rauscher, A. von Keudell, F. Rossi, Removal of model proteins using beams of argon ions and of oxygen atoms and molecules: mimicking the action of low-pressure Ar/O2 ICP discharges, Plasma Processes and Polymers 6 (2009) 255

26. J. Benedikt, D. Ellerweg, A. von Keudell, Molecular beam sampling system with very high beam-to-background ratio: the rotating skimmer concept, Review of Scientific Instruments 80 (2009) 55107

25. V. Raballand, J. Benedikt, S. Hoffmann, M. Zimmermann, A. von Keudell, Deposition of silicon dioxide films using an atmospheric pressure microplasma jet, J. Appl. Phys. 105 (2009) 083304

24. A. Consoli, J. Benedikt, A. von Keudell, The role of C2H4 for the acetylene chemistry in particle forming Ar/He/C2H2 plasma studied via quantitative mass spectrometry, Plasma Sources Science and Technology 18 (2009) 34004

23. C. Wachtendorf, C. Herweg, M. Daeuber, J. Benedikt, A. von Keudell, Thin film growth from a low pressure plasma excited in a supersonic expanding gas jet, J. Phys. D: Appl. Phys. 42 (2009) 95205

2008

22. M. Mao, J. Benedikt, A. Consoli, A. Bogaerts, New pathways for nanoparticle formation in acetylene dusty plasmas: a modelling investigation and comparison with experiments, J. Phys. D 41 (2008) 225201

21. V. Raballand, J. Benedikt, A. von Keudell, Deposition of carbon free silicon dioxide from pure hexamethyldisiloxane using an atmospheric microplasma jet, Appl. Phys. Lett. 92 (2008) 091502

20. V. Raballand, J. Benedikt, J. Wunderlich, A von Keudell, Inactivation of Bacillus atrophaeus and of Aspergillus niger using beams of argon ions, of oxygen molecules and of oxygen atoms, J. Phys. D: Appl. Phys. 41 (2008) 115207

19. A. Consoli, J. Benedikt,s A. von Keudell, Initial Polymerization Reactions in Particle-Forming Ar/He/C2H2 Plasmas Studied via Quantitative Mass Spectrometry, J. Phys. Chem. A, 112 (2008) 113199

2007

18. J. Benedikt, V. Raballand A. Yanguas-Gil, K. Focke, A. von Keudell, Thin Film deposition by means of atmospheric pressure microplasmas, Plasma Physics and Controlled Fusion 49 (2007) 419

17. A. Yanguas-Gil, K. Focke, J. Benedikt, A. von Keudell, Optical and Electrical Characterization of a microplasma jet operated at atmospheric pressure, J. Appl. Phys. 101 (2007) 103307

16. J. Opretzka, J. Benedikt, P. Awakowicz, J. Wunderlich, A. von Keudell, The role of chemical sputtering during plasma sterilization of Bacillus Atrophaeus, J. Phys. D 40 (2007) 2826

15. J. Benedikt, A. Consoli, M. Schulze, A. von Keudell, Time resolved molecular beam mass spectrometry of the initial stage of particle formation in an Ar/He/C2H2 plasma, J. Phys. Chem. A 111 (2007) 10453

14. A. von Keudell, I. Kim, A. Consoli, M. Schulze, A. Yanguas-Gil, J. Benedikt, The search for growth precursors in reactive plasmas: from nanoparticles to microplasmas, Plasma Sources Sci. Technol. 16 (2007)

2006

13. J. Benedikt, K. Focke, A. Yanguas-Gil, A. von Keudell, Atmospheric pressure microplasma jet as a depositing tool, Appl. Phys. Lett. 89, (2006) 1

12. I.-Y. Kim, S.-H. Hong, A. Consoli, J. Benedikt, A. von Keudell, Roughness evolution during a-C:H film growth in methane plasmas, J. Appl. Phys 100 (2006) 053302

11. M. Creatore, Y. Barrell, J. Benedikt and M.C.M. van de Sanden, On the hexamethyldisiloxane dissociation paths in a remote Ar-fed expanding thermal plasma, Plasma Sources Sci. Technol. 15 (2006) 421

2005 and before

10. J. Benedikt, D. C. Schram, M. C. M. van de Sanden, Detailed TIMS study of Ar/C2H2 expanding thermal plasma: identification of a-C:H film growth precursors, J. Phys. Chem. A 109 (2005) 10153

9. J. Benedikt, S. Agarwal, D.J. Eijkman, W. Vandamme, M. Creatore, M.C.M. van de Sanden, Threshold ionization mass spectrometry of reactive species in remote Ar/C2H2 expanding thermal plasma, J. Vac. Sci. Techn. A 23 (2005) 1400

8. J. Benedikt, D.J. Eijkman, W. Vandamme, S. Agarwal, M.C.M. van de Sanden, Threshold ionization mass spectrometry study of hydrogenated amorphous carbon films growth precursors, Chem. Phys. Lett. 402 (2005) 37

7. E. Neyts, A. Bogaerts, R. Gijbels, J. Benedikt, M.C.M. van de Sanden, Molecular dynamics simulation of the impact behaviour of various hydrocarbon species on DLC, Nucl. Instrum. Methods Phys. Res., Sect. B 228 (2005) 315

6. A.-L. Hamon, J. Verbeeck, D. Schryvers, J. Benedikt, M.C.M. van de Sanden, ELNES study of carbon K-edge spectra of plasma deposited carbon films, J. Mater. Chem. 14 (2004) 2030

5. M. Creatore, W.M.M. Kessels, Y. Barrell, J. Benedikt, M.C.M. van de Sanden, Expanding thermal plasma for low-k dielectrics: engineering the film chemistry by means of specific dissociation paths in the plasma, Mater. Sci. Semiconductor Process. 7 (2004) 283

4. E. Neyts, A. Bogaerts, R. Gijbels, J. Benedikt, M.C.M. van de Sanden, Molecular dynamics simulations for the growth of diamond-like carbon films from low kinetic energy species, Diamond Relat. Mater. 13 (2004) 1873

3. J. Benedikt, R.V. Woen, S.L. M. van Mensfoort, V. Perina, J. Hong, M.C.M van de Sanden, Plasma Chemistry During the Deposition of a-C:H films and its influence on film properties, Diamond and Related Materials 12 (2003) 90

2. J. Benedikt, M. Wisse, R.V. Woen, R. Engeln, M.C.M. van de Sanden, The role of carbon atoms in the remote plasma deposition of hydrogenated amorphous carbon, J. Appl. Phys. 94 (2003) 6932

1. J. Benedikt, K.G.Y. Letourneur, M. Wisse, D.C. Schram, M.C.M. van de Sanden, Plasma chemistry during deposition o